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Continue to ChatEpitaxial growth of SiC on AlN/Sapphire using hexamethyldisilane by MOVPE - https://avesis.marmara.edu.tr/publication/details/458b8af6-40d7-485c-88ba-287df6cb05d9/epitaxial-growth-of-sic-on-aln-sapphire-using-hexamethyldisilane-by-movpe